Degradation of Quality Factor of Superconducting Resonators by Remaining Metallic Film and Improved Fabrication Process Using Caldera Planarization
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Published:2019-08
Issue:5
Volume:29
Page:1-6
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ISSN:1051-8223
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Container-title:IEEE Transactions on Applied Superconductivity
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language:
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Short-container-title:IEEE Trans. Appl. Supercond.
Author:
Irimatsugawa TomoyaORCID,
Yamamori HirotakeORCID,
Hirayama FuminoriORCID,
Nagasawa Shuichi,
Fujii Go,
Kohjiro Satoshi,
Sato Akira,
Fukuda Daiji,
Hidaka MutsuoORCID,
Sato Yasushi,
Ohno Masashi,
Takahashi Hiroyuki
Funder
Ministry of Education, Culture, Sports, Science and Technology
Japan Science and Technology Agency
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials