1. Sumy State University,Department of Nanoelectronics and Surface Modification,Sumy,Ukraine
2. Sumy State University,Biomedical Research Centre,Sumy,Ukraine
3. ‘Kharkiv Institute of Physics and Technology’,Laboratory of experiments and automation Plasma Technology), National Science Center,Kharkiv,Ukraine
4. Institute of Atomic Physics and Spectroscopy, University of Latvia,Riga,Latvia