Effect of Wafer Tilt During Ion Implantation on the Performance of a Silicon Traveling-Wave Mach-Zehnder Modulator-Reference-Cited by-同舟云学术

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Effect of Wafer Tilt During Ion Implantation on the Performance of a Silicon Traveling-Wave Mach-Zehnder Modulator

Published:2021 Issue: Volume:9 Page:149993-150003
ISSN:2169-3536
Container-title:IEEE Access
language:
Short-container-title:IEEE Access

Author:

Mishra Darpan^ORCID,Sonkar Ramesh Kumar^ORCID

Funder

Science and Engineering Research Board

Department of Science and Technology (DST-FIST), Government of India

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

General Engineering,General Materials Science,General Computer Science

Link

http://xplorestaging.ieee.org/ielx7/6287639/9312710/09600820.pdf?arnumber=9600820

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