Affiliation:
1. School of Mechanical Engineering, Anhui University of Science and Technology, Anhui, Huainan, China
Funder
National Natural Science Foundation of China
Anhui Provincial Natural Science Foundation
China Postdoctoral Science Foundation
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
General Engineering,General Materials Science,General Computer Science
Reference21 articles.
1. Design of a linear macro–micro actuation stage considering vibration isolation
2. Implementation and experiment of an active vibration reduction strategy for macro-micro positioning system
3. Design and control of ultra-precision fine positioning stage for scanning bean interference lithography;lu;Acta Optica Sinica,2017
4. The research of high precision control methods for piezoceramic actuators;wang;Chinese Journal of Mechanical Engineering,2002
5. Research on dynamic characteristic of micro-displacement mechanism based on piezoelectric actuator;sun;Piezoelectr Acoustoopt,2007
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献