Scheduling of single-arm cluster tools mixedly processing two kinds of wafers
Author:
Affiliation:
1. China Jiliang University,Department of Applied Mathematics,Hangzhou,P. R. China
2. College of Science, China Jiliang University,Hangzhou,P. R. China
3. School of Management Hangzhou Dianzi University,Hangzhou,P. R. China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10004025/10004026/10004192.pdf?arnumber=10004192
Reference18 articles.
1. A Cyclic Scheduling Approach to Single-Arm Cluster Tools With Multiple Wafer Types and Residency Time Constraints
2. Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations
3. Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types
4. Schedulability Analysis of Time-Constrained Cluster Tools With Bounded Time Variation by an Extended Petri Net
5. A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints
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