An On-Chip Bistable Structure for Extracting the Impact Fracture Strength of the Microstructure
Author:
Affiliation:
1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Beijing,CHINA
Funder
National Key R&D Program of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699465.pdf?arnumber=9699465
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2. Testing Techniques for Shock Accelerometers below 10,000 g;tsutsui;Dynamic Behavior of Materials,2013
3. Influences of specimen size and deformation mode on the strength of single-crystal silicon micro-beam structures
4. Strength Distributions in Polycrystalline Silicon MEMS
5. a universal structure for self-aligned in situ on-chip micro tensile fracture strength test;rui;MEMS,2017
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