PZT MEMS Speaker Integrated with Silicon-Parylene Composite Corrugated Diaphragm
Author:
Affiliation:
1. University of Tohoku,Japan
2. Stanley Electric Co., Ltd,Japan
3. AAC Technologies Pte., Ltd,Singapore
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699539.pdf?arnumber=9699539
Reference5 articles.
1. Stylus type MEMS texture sensor covered with corrugated diaphragm
2. Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators
3. Parylene to silicon adhesion enhancement
4. LOWFREQUENCY SOUND PRESSURE LEVEL IMPROVEMENT OF PIEZOELECTRIC MEMS MICROSPEAKER USING NOVEL SPIRAL SPRING WITH DUAL ELECTRODE;cheng;Transducers 2019,2019
5. New integrated full-range MEMS speaker for in-ear applications
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1. Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review;Micromachines;2023-04-14
2. A Piezoelectric MEMS Speaker with Stretchable Film Sealing;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
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