PZT MEMS Speaker Integrated with Silicon-Parylene Composite Corrugated Diaphragm-Reference-Cited by-同舟云学术

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PZT MEMS Speaker Integrated with Silicon-Parylene Composite Corrugated Diaphragm

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Hirano Yuki¹,Suzuki Yukio¹,Fujita Norihito¹,Li Chung-Min²,Chiba Hirofumi²,Tanaka Shuji³

Affiliation:

1. University of Tohoku,Japan

2. Stanley Electric Co., Ltd,Japan

3. AAC Technologies Pte., Ltd,Singapore

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699539.pdf?arnumber=9699539

Reference5 articles.

1. Stylus type MEMS texture sensor covered with corrugated diaphragm

2. Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators

3. Parylene to silicon adhesion enhancement

4. LOWFREQUENCY SOUND PRESSURE LEVEL IMPROVEMENT OF PIEZOELECTRIC MEMS MICROSPEAKER USING NOVEL SPIRAL SPRING WITH DUAL ELECTRODE;cheng;Transducers 2019,2019

5. New integrated full-range MEMS speaker for in-ear applications

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review;Micromachines;2023-04-14

2. A Piezoelectric MEMS Speaker with Stretchable Film Sealing;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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