Blocking Pressure Enhancement in SOI Through-Wafer Monolithic Knudsen PUMPs-Reference-Cited by-同舟云学术

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Blocking Pressure Enhancement in SOI Through-Wafer Monolithic Knudsen PUMPs

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
language:
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Author:

Byambadorj Tsenguun¹,Qin Yutao¹,Gianchandani Yogesh B.¹

Affiliation:

1. Center for Wireless Integrated MicroSensing and Systems (WIMS2) University of Michigan,Ann Arbor,MI,USA,48109

Funder

Office of the Director of National Intelligence (ODNI)

Intelligence Advanced Research Projects Activity (IARPA)

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699567.pdf?arnumber=9699567

Reference11 articles.

1. A monolithic Si-micromachined four-stage Knudsen pump for µGC applications

2. Progressive Cellular Architecture in Microscale Gas Chromatography for Broad Chemical Analyses

3. Non-isothermal gas flow through rectangular microchannels

4. Thermal transpiration in zeolites: A mechanism for motionless gas pumps

5. Fabrication of keyhole-free ultra-deep high-aspect-ratio isolation trench and its applications

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Monolithic SOI through-wafer Knudsen pumps with mechanically robust Si channels;Sensors and Actuators A: Physical;2024-01

2. Real-time gas mass spectroscopy by multivariate analysis;Scientific Reports;2023-04-13

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