A Dual Sensing Modes Capacitive Tactile Sensor For Proximity and Tri-Axial Forces Detection
Author:
Affiliation:
1. National Tsing Hua University,Dept. of Power Mech. Eng.,Hsinchu City,Taiwan
2. Inst. of NanoEng. and Microsyst., National Tsing Hua University,Hsinchu City,Taiwan
Funder
Ministry of Science and Technology of Taiwan
TSMC
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699713.pdf?arnumber=9699713
Reference11 articles.
1. CMOS-Based Tactile Force Sensor: A Review
2. CMOS-MEMS Tri-Axial Piezo-Resistive Tactile Sensor with Monolithically/Vertically Integrated Inductive Proximity Sensor
3. Development of a CMOS-Based Capacitive Tactile Sensor With Adjustable Sensing Range and Sensitivity Using Polymer Fill-In
4. Combined Capacitive and Ultrasonic Distance Measurement for Automotive Applications
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2. High-Resolution CMOS Tactile-Proximity Sensor Array: Design, Fabrication, and Performance Evaluation;IEEE Sensors Journal;2024-08-15
3. A Dual Spiral-Coils Tactile Sensor with Novel Driving Modes for Inductive Force and Capacitive Proximity Sensing;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
4. MEMS 6-axis force sensor chip for spike pins in athletic sports shoes;Sensors and Actuators A: Physical;2023-12
5. Piezoresistive Composites in Tension and Compression Using a Cantilevered Beam for Spot Testing and Tactile Sensing;Journal of Testing and Evaluation;2023-02-16
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