A Mems Based Electrochemical Angular Accelerometer with a High-Integrated Sensing Unit
Author:
Affiliation:
1. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Science,Beijing,China
Funder
Chinese Academy of Sciences
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699507.pdf?arnumber=9699507
Reference12 articles.
1. Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers;hidetoshi;Sensors and Actuators,2019
2. Introduction to the Special Issue on Rotational Seismology and Engineering Applications
3. A MEMS-Based Electrochemical Angular Accelerometer With a Force-Balanced Negative Feedback
4. Precession Azimuth Sensing with Low-Noise Molecular Electronics Angular Sensors
5. A Micromachined Electrochemical Angular Accelerometer Based on Interdigital Electrodes
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