Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate-Reference-Cited by-同舟云学术

Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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Author:

Wu Jinbo¹,Zhang Shibin¹,Zhou Hongyan¹,Zhang Liping¹,Zheng Pengcheng¹,Yao Hulin¹,Zhao Xiaomeng¹,Huang Kai¹,Wu Tao²,Ou Xin¹

Affiliation:

1. Shanghai Institute of Microsystem and Information Technology,The State Key Laboratory of Functional Materials for Informatics,Shanghai,CHINA,200050

2. ShanghaiTech University,Shanghai,CHINA,201210

Funder

National Natural Science Foundation of China

Program of Shanghai Academic Research Leader

K. C. Wong Education Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699723.pdf?arnumber=9699723

Reference18 articles.

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2. Surface Wave and Lamb Wave Acoustic Devices on Heterogenous Substrate for 5G Front-Ends

3. High rejection UNII 5.2GHz wideband bulk acoustic wave filters using undoped single crystal AlN-on-SiC resonators

4. Monolithic Multiband MEMS RF Front-End Module for 5G Mobile;campanella;Journal of Microelectromechanical Systems,2020

5. Single-chip multi-frequency wideband filters based on aluminum nitride Cross-sectional Lamé mode resonators with thick and apodized electrodes;chen;The 31st IEEE International Conference on Micro Electro Mechanical Systems MEMS 2018,0

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