Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film-Reference-Cited by-同舟云学术

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Angular Accelerometer with Integrated Liquid Spiral Channel and lig Sensing Element on Polyimide Film

Published:2022-01-09 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
language:
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Author:

Nakashima Rihachiro¹,Takahashi Hidetoshi¹

Affiliation:

1. Keio University,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699455.pdf?arnumber=9699455

Reference7 articles.

1. Bio-Inspired Micro-Fluidic Angular-Rate Sensor for Vestibular Prostheses

2. A micromachined angular-acceleration sensor for geophysical applications

3. Laser-induced porous graphene films from commercial polymers

4. An Angular Accelerometer with High Sensitivity and Low Crosstalk Utilizing a Piezoresistive Cantilever and Spiral Liquid Channels;jo;IEEE Sens J,2021

5. Laser-Induced Graphene Strain Sensors Produced by Ultraviolet Irradiation of Polyimide

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