Phase Noise Optimization of Piezoelectric Bulk Mode MEMS Oscillators Based on Phase Feedback in Secondary Loop
Author:
Affiliation:
1. Institute of NanoEngineering and MicroSystems, National Tsing Hua University,Hsinchu,Taiwan
2. Center for Nanoscience and Engineering, Indian Institute of Science,Bengaluru,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699576.pdf?arnumber=9699576
Reference11 articles.
1. A Vertically Coupled MEMS Resonator Pair for Oscillator Applications
2. Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators
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5. Design of Piezoelectric MEMS Bulk Acoustic Wave Mode-Matched Gyroscopes Based on Support Transducer
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