Low Dielectric Filling Factor Millimeter-Wave Photonic Crystal Resonator Micromachined From NTD High-Resistivity Silicon-Reference-Cited by-同舟云学术

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Low Dielectric Filling Factor Millimeter-Wave Photonic Crystal Resonator Micromachined From NTD High-Resistivity Silicon

Published:2024 Issue: Volume: Page:1-12
ISSN:0018-9480
Container-title:IEEE Transactions on Microwave Theory and Techniques
language:
Short-container-title:IEEE Trans. Microwave Theory Techn.

Author:

Hanham Stephen M.¹^ORCID,Buchholz Jan-Hendrik²,Fischer Horst²,Gollor Uwe²,Lehmke Jonas²,Wischmann Wolfgang²,Ghosh Indra²^ORCID,Lia Enrico³,Walter Benjamin⁴^ORCID,Bavedila Fuanki⁴,Faucher Marc⁴^ORCID,Gregory Andrew⁵^ORCID,Jensen Leif⁶^ORCID,Follmann Rüdiger²

Affiliation:

1. Department of Materials, Imperial College London, London, U.K.

2. IMST GmbH, Kamp-Lintfort, Germany

3. European Space Agency, ESA-ESTEC, Noordwijk, The Netherlands

4. Vmicro SAS, Villeneuve-d’Ascq, France

5. National Physical Laboratory, Teddington, U.K.

6. TopSil GlobalWafers A/S, Frederikssund, Denmark

Funder

European Space Agency

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/22/4359079/10530420.pdf?arnumber=10530420

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