An Advanced Calibration Method for Probe Leakage Correction in On-Wafer Test Systems-Reference-Cited by-同舟云学术

An Advanced Calibration Method for Probe Leakage Correction in On-Wafer Test Systems

Published:2023-02 Issue:2 Volume:71 Page:682-690
ISSN:0018-9480
Container-title:IEEE Transactions on Microwave Theory and Techniques
language:
Short-container-title:IEEE Trans. Microwave Theory Techn.

Author:

Wang Yibang¹^ORCID,Fu Xingchang¹^ORCID,Wu Aihua¹^ORCID,Huo Ye¹^ORCID,Liu Chen¹^ORCID,Luan Peng¹^ORCID,Lei Lihua²^ORCID,Liang Faguo¹^ORCID,Li Chong³^ORCID

Affiliation:

1. Department of Metrology and Maintenance, Hebei Semiconductor Research Institute, Shijiazhuang, China

2. Shanghai Key Laboratory of Online Test and Control Technology, Shanghai Institute of Measurement and Testing Technology, Shanghai, China

3. James Watt School of Engineering, University of Glasgow, Glasgow, U.K.

Funder

U.K. EPSRC

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Radiation

Link

http://xplorestaging.ieee.org/ielx7/22/10040254/09872127.pdf?arnumber=9872127

Reference32 articles.

1. Generalized Thru-Reflect-Line Calibration Technique for the Measurement of Multimodal Radiating Waveguides

2. Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer

3. A Compact Variable-Temperature Broadband Series-Resistor Calibration

4. Series-Resistor Calibration

5. Characteristic impedance determination using propagation constant measurement

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Establishing On-Wafer Calibration Standards for the 16-Term Error Model: Application to Silicon High-Frequency Transistor Characterization;IEEE Journal of Microwaves;2024-07

2. Symmetric-Reciprocal-Match Method for Vector Network Analyzer Calibration;IEEE Transactions on Instrumentation and Measurement;2024

3. Sensitivity and Uncertainty Analysis of Nonideal Calibration Standards for 16-Term Error Model;IEEE Transactions on Microwave Theory and Techniques;2023-10

4. A Novel Four-Port Symmetric Probe Calibration Method for On-Wafer S-Parameter Measurement;IEEE Transactions on Microwave Theory and Techniques;2023