1. International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
2. Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
3. Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
4. Department of Materials Science and Engineering, International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu, Taiwan