Field Emission Tip Array Fabrication Utilizing Geometrical Hindrance in the Oxidation of Si

Author:

Ke Sun ,Wei Zhang ,Biyun Li ,Jae Young Lee ,Ya-Hong Xie ,Schroeder T.,Katzer J.,Xinyu Wei ,Russell T. P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Ordered silicon nanocone fabrication by using pseudo-Bosch process and maskless etching;Journal of Vacuum Science & Technology B;2024-05-01

2. Self-Aligned Formation and Positioning of Nanogap Templates;2023 IEEE Nanotechnology Materials and Devices Conference (NMDC);2023-10-22

3. Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching;Micromachines;2020-06-29

4. Oxidation sharpening of silicon tips in the atmospheric environment;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11

5. Broadband surface-enhanced coherent anti-Stokes Raman spectroscopy with high spectral resolution;Journal of Raman Spectroscopy;2017-05-31

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