Author:
Baehr Ulrich,Freier Marvin,Lewis Matthew,Rosenstiel Wolfgang,Bringmann Oliver
Cited by
2 articles.
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1. Experimental Study on Repetitive Shock Measurements for MEMS Accelerometers;2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP);2024-06-02
2. Frequency Induced Stiction for MEMS Accelerometers;Journal of Microelectromechanical Systems;2020-06