Author:
Akrout C.,Bialas J.,Canada M.,Cawthron D.,Corr J.,Davari B.,Floyd R.,Geissler S.,Goldblatt R.,Houle R.,Kartschoke P.,Kramer D.,McCormick P.,Rohrer N.,Salem G.,Schulz R.,Su L.,Whitney L.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering
Cited by
16 articles.
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2. References;Three-dimensional Integrated Circuit Design;2009
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5. Impact of three-dimensional transistor on the pattern area reduction for ULSI;IEEE Transactions on Electron Devices;2003-10