Wideband 6 GHz RF Filters for Wi-Fi 6E Using a Unique BAW Process and Highly Sc-doped AlN Thin Film

Author:

Kim D.,Moreno G.,Bi F.,Winters M.,Houlden R.,Aichele D.,Shealy J.B.

Publisher

IEEE

Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process;IEEE Transactions on Electron Devices;2024-09

2. Effect of phase correction produced by trimming layer on thin-film bulk acoustic resonator;Journal of Applied Physics;2024-07-18

3. A review of oriented wurtzite-structure aluminum nitride films;Journal of Alloys and Compounds;2024-06

4. On the Design of High Overtone BAW Resonators with Enhanced Power Handling;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

5. Wide-Band and High-Rejection RF Filters for 5G Applications Using BAW-on-Insulator Technology;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

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