Quality factor and eigen frequency analysis of micromirrors
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Published:2016-12
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Container-title:2016 International Conference on Control, Instrumentation, Communication and Computational Technologies (ICCICCT)
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Author:
Finny Sharon,Resmi R.
Cited by
1 articles.
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1. Damping Analysis in Si Torsional Micromirrors;Journal of Physics: Conference Series;2022-08-01