Design of Micro Displacement Measurement System Based on Flat Capacitive Sensor

Author:

Li Jing1,Kang Jianbing1,Lian Huadong1,Zhao Xin1,Lin Zhe1

Affiliation:

1. China Academy of Space Technology,Beijing Institute of Space Mechanics and Electricity,Beijing,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Reference10 articles.

1. Development status and prospect of satellite-based surveying;Yuanxi;Chinese Space Science and Technology,2022

2. Laser Precision Ranging Technology;Yifan;Spacecraft recovery & remote sensing,2021

3. Design and Implementation of Scan-arm Corner Cube Interferometer with Large OPD and High Robustness;Lizhou;Spacecraft recovery & remote sensing,2018

4. Review of High Precision Distance Metrology in Space Application;Yun;Spacecraft recovery & remote sensing,2021

5. Research on the Detecting Technology of Tiny Capacitance;Jia,2014

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