High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe

Published:2023 Issue: Volume:72 Page:1-8
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Qu Zilian¹^ORCID,Wang Wensong²^ORCID,Yang Zhengchun³^ORCID,Bao Qiwen⁴^ORCID,Li Xueli¹^ORCID

Affiliation:

1. Beijing Information Technology College, Beijing, China

2. School of Electrical and Electronic Engineering, Nanyang Technological University, Jurong West, Singapore

3. School of Electrical and Electronic Engineering, Tianjin University of Technology, Tianjin, China

4. School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, China

Funder

Research and Development Program of Beijing Municipal Education Commission

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/19/10012124/10283968.pdf?arnumber=10283968

Reference27 articles.

1. Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation

2. Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique

3. Thickness measurement of multi-layer conductive coatings using multifrequency eddy current techniques

4. A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection

5. A method for non-destructive resistivity mapping in silicon detectors

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancements of Humidity and Gap-Sensing Properties of Coil-Shaped SnO₂ Based on Layered Sputtering Method;IEEE Transactions on Instrumentation and Measurement;2024

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3