Author:
Chinni V.R.,Huang T.C.,Wai P.K.A.,Menyuk C.R.,Simonis C.J.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Cited by
1 articles.
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1. Fabrication challenges for indium phosphide microsystems;Journal of Micromechanics and Microengineering;2015-03-17