Cycle Planning for Concurrent Processing in a Dual-Armed Cluster Tool
Author:
Affiliation:
1. Korea Advanced Institute of Science and Technology,Department of Industrial and Systems Engineering,Daejeon,South Korea,34141
2. School of Business, Chungnam National University,Daejeon,South Korea,34134
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10260321/10260291/10260449.pdf?arnumber=10260449
Reference14 articles.
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2. Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module
3. Scheduling analysis of time-constrained dual-armed cluster tools
4. Concurrent processing of multiple wafer types in a single-armed cluster tool
5. Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules
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