Scheduling Analysis of Diffusion Area in Semiconductor Manufacturing
Author:
Affiliation:
1. Institute of Systems Engineering, Macau University of Science and Technology,Macao,China,999078
2. IKAS Industries Company, Ltd., Liangjiang New District Internet Industry Park Phase III,Chongqing,China,400000
Funder
Science and Technology development fund (FDCT)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10260321/10260291/10260420.pdf?arnumber=10260420
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4. Adaptive genetic algorithm for two-stage hybrid flow-shop scheduling with sequence-independent setup time and no-interruption requirement
5. A hybrid ant colony optimization method for scheduling batch processing machine in the semiconductor manufacturing
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