Analysis of temperature variation influence on damping coefficient and Q-factor of 2-DOF vibratory rotational velocity sensor-Reference-Cited by-同舟云学术

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Analysis of temperature variation influence on damping coefficient and Q-factor of 2-DOF vibratory rotational velocity sensor

Published:2022-05-31 Issue: Volume: Page:
ISSN:
Container-title:2022 21st IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (iTherm)
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Author:

Nazdrowicz Jacek¹,Jankowski Mariusz¹,Stawinski Adam¹,Napieralski Andrzej¹

Affiliation:

1. Lodz University of Technology,Department of Microelectronics and Computer Science,Lodz,Poland

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9899435/9899496/09899534.pdf?arnumber=9899534

Reference15 articles.

1. Micromachined inertial sensors

2. Modern Inertial Technology

3. Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

4. Sensing and Control Electronics for Low-Mass Low-Capacitance MEMS Accelerometer;zhang;Ph D Dissertation,2002

5. Effect of holes and edges on the squeeze fil damping of erforated micro-mechanical structures;kim;IEEE Int Conf MEMS,1999

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Testbed to Characterize MEMS Sensor Degradation During Extended Operation;AIAA SCITECH 2024 Forum;2024-01-04

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