Author:
Karthikeyan M.,Fox S.,Cote W.,Yeric G.,Hall M.,Garcia J.,Mitchell B.,Wolf E.,Agarwal S.
Cited by
2 articles.
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1. Resistors;Microelectronic Test Structures for CMOS Technology;2011
2. Electrical validation of through-process optical proximity correction verification limits;Journal of Micro/Nanolithography, MEMS, and MOEMS;2010-10-01