Analysis of air damping in micromachined resonators-Reference-Cited by-同舟云学术

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Analysis of air damping in micromachined resonators

Published:2012-03 Issue: Volume: Page:
ISSN:
Container-title:2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Wu Guoqiang,Xu Dehui,Xiong Bin,Ma Yinglei,Wang Yuelin,Jing Errong

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/6189421/6196692/06196819.pdf?arnumber=6196819

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic Spectroscopy;2023 IEEE SENSORS;2023-10-29

2. Cantilever-enhanced photoacoustic spectroscopy for gas sensing: A comparison of different displacement detection methods;Photoacoustics;2022-12

3. Slide film damping in microelectromechanical system devices;Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems;2013-08-22

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