Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions-Reference-Cited by-同舟云学术

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Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions

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Container-title:[1993] Proceedings IEEE Micro Electro Mechanical Systems
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Author:

Gilbert J.R.,Osterberg P.M.,Harris R.M.,Ouma D.O.,Cai X.,Pfajfer A.,White J.,Senturia S.D.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/1052/7345/00296921.pdf?arnumber=296921

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