Etching technology for microchannels-Reference-Cited by-同舟云学术

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Etching technology for microchannels

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Container-title:Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
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Author:

Tjerkstra R.W.,De Boer M.,Berenschot E.,Gardeniers J.G.E.,van den Berg A.,Elwenspoek M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/4441/12601/00581790.pdf?arnumber=581790

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A Review on Application of MEM’s Sensors for Structural Health Monitoring;SSRN Electronic Journal;2019

3. Accurate Models for Optimizing Tapered Microchannel Heat Sinks in 3D ICs;2018 IEEE Computer Society Annual Symposium on VLSI (ISVLSI);2018-07

4. Integrated Pressure Sensing Using Capacitive Coriolis Mass Flow Sensors;Journal of Microelectromechanical Systems;2017-06

5. Materials and Surfaces in Microfluidic Biosensors;Microfluidics for Biologists;2016

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