Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions-Reference-Cited by-同舟云学术

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Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions

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Container-title:IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
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Author:

Walker J.A.,Gabriel K.J.,Mehregany M.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx2/126/3338/00110248.pdf?arnumber=110248

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS;Journal of Micromechanics and Microengineering;2023-05-16

2. Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap;Microelectronic Engineering;2012-09

3. In-Use Failures;MEMS Reliability;2010-09-06

4. Use of nanoporous columnar thin film in the wafer-level packaging of MEMS devices;Journal of Micromechanics and Microengineering;2010-03-05

5. Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs®;2008 1st Microsystems and Nanoelectronics Research Conference;2008-10

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