Actuated Micro-optical Submount Using a Dielectric Elastomer Actuator
Author:
Affiliation:
1. Fraunhofer Institute for Reliability and Microintegration, Berlin, Germany
2. Department of Applied Condensed-Matter Physics, University of Potsdam, Potsdam, Germany
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx5/3516/5685329/05658158.pdf?arnumber=5658158
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