Author:
Boeren Frank,Bareja Abhishek,Kok Tom,Oomen Tom
Funder
NXP Semiconductors
Philips Innovation Services
Innovational Research Incentives Scheme
VENI Grant Precision Motion: Beyond the Nanometer 13073
NWO
STW
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering
Cited by
66 articles.
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