1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai, Japan
2. Faculty of Production Systems Engineering and Sciences, Komatsu University, Komatsu, Japan
3. Graduate School of Science and Engineering, Ibaraki University, Hitachi, Japan
4. Development Department Tohoku Steel Company Ltd., Murata, Japan
5. Micro System Integration Center, Tohoku University, Sendai, Japan