Author:
Watanabe A.,Kobayashi T.,Egi T.,Yoshida T.
Cited by
5 articles.
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1. Semiconductor Manufacturing;Green Manufacturing;2012-11-03
2. Life-Cycle Assessment of Semiconductors;2012
3. Optimal replenishment policies for deteriorating control wafers inventory;The International Journal of Advanced Manufacturing Technology;2006-11-18
4. Yield improvement planning for the recycle processes of test wafers;The International Journal of Advanced Manufacturing Technology;2005-03-16
5. Downgrade decision for control/dummy wafers in a fab;The International Journal of Advanced Manufacturing Technology;2004-12-01