AMHS for 300 mm wafer-Reference-Cited by-同舟云学术

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AMHS for 300 mm wafer

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Container-title:1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)
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Author:

Kurosaki R.,Nagao N.,Komada H.,Watanabe Y.,Yano H.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/5364/14503/00664525.pdf?arnumber=664525

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reentrant hybrid flow shop scheduling with stockers in automated material handling systems using deep reinforcement learning;Computers & Industrial Engineering;2024-03

2. Visual Exploration and Planning of the Automated Material Handling System for Smart Factory in the Immersive Environment;2023 IEEE Conference on Virtual Reality and 3D User Interfaces Abstracts and Workshops (VRW);2023-03

3. A simulation-based optimization approach for a semiconductor photobay with automated material handling system;Simulation Modelling Practice and Theory;2014-08

4. Optimal vehicle allocation for an Automated Materials Handling System using simulation optimisation;International Journal of Production Research;2012-10-15

5. The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab;European J. of Industrial Engineering;2012

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