Composite silicide gate electrodes—Interconnections for VLSI device technologies-Reference-Cited by-同舟云学术

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Composite silicide gate electrodes—Interconnections for VLSI device technologies

Published:1980-08 Issue:8 Volume:27 Page:1417-1424
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Geipel H.J.,Ning Hsieh ,Ishaq M.H.,Koburger C.W.,White F.R.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/16/31805/01480843.pdf?arnumber=1480843

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