Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. EPR investigations of gamma-irradiated novolacs;International Journal of Radiation Applications and Instrumentation. Part C. Radiation Physics and Chemistry;1991-01
2. Characterization of a high-resolution novolak based negative electron-beam resist with 4 μC/cm2 sensitivity;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-01
3. Radiation Exposure;Semiconductor Lithography;1988
4. Negative Radiation Resists;Semiconductor Lithography;1988
5. Additive Processes;Semiconductor Lithography;1988