Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
18 articles.
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1. Comparison of retrograde and conventional p-wells in regard of latch-up susceptibility;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
2. Improved device performance by multistep or carbon co-implants;IEEE Transactions on Electron Devices;1994
3. The behavior of high energy multiple P+ (0.5–7.5 MeV) and B+ implanted silicon and rapid thermal annealing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-04
4. CMOS technologies for logic applications;Microelectronic Engineering;1991-10
5. High-energy ion implantation for ULSI;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07