Temperature drift compensation of a tuned low stiffness MEMS accelerometer based on double-sided parallel plates-Reference-Cited by-同舟云学术

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Temperature drift compensation of a tuned low stiffness MEMS accelerometer based on double-sided parallel plates

Published:2022-04-14 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Zhang Tengfei¹,Ma Zhipeng¹,Jin Yiming¹,Ye Ziyi¹,Zheng Xudong¹,Jin Zhonghe¹

Affiliation:

1. School of Aeronautics and Astronautics of Zhejiang University, and the Key Laboratory of Micro/Nano-Satellite Research of Zhejiang Province,China,0571-8795-2991

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9791120/9791087/09791155.pdf?arnumber=9791155

Reference13 articles.

1. Scale factor temperature drift suppressing method for capacitor micro accelerometer;liu;Journal of Chinese Inertial Technology,2018

2. Stabilization Control of a MEMS Accelerometer With Tuned Quasi-Zero Stiffness

3. Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement

4. MEMS Linear and Nonlinear Statics and Dynamics

5. Temperature characteristics of microaccelerometers with constant temperature chip sensor;li;Journal of Tsinghua University (Science and Technology),2010

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Temperature Drift Compensation of a MEMS Accelerometer Based on DLSTM and ISSA;Sensors;2023-02-06

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