Single Wavelength Blue-Laser Optical Head-Like Opto-Mechanical System for Turntable Thermal Mode Lithography and Stamper Fabrication-Reference-Cited by-同舟云学术

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Single Wavelength Blue-Laser Optical Head-Like Opto-Mechanical System for Turntable Thermal Mode Lithography and Stamper Fabrication

Published:2011-03 Issue:3 Volume:47 Page:701-705
ISSN:0018-9464
Container-title:IEEE Transactions on Magnetics
language:
Short-container-title:IEEE Trans. Magn.

Author:

Yang Chin-Tien,Chen Chih-Yu,Huang Chun-Chieh,Lee Yuan-Chin,Chen Shuen-Chen,Cheng Chung-Ta

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/20/5721798/05721859.pdf?arnumber=5721859

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pattern Transfer for Laser Heat-Mode Lithography;Laser Heat-Mode Lithography;2019

2. High-Speed Rotation-Type Laser Heat-Mode Lithography System;Laser Heat-Mode Lithography;2019

3. Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns;Precision Engineering;2016-10

4. Increasing the spectral shifts in LSPR biosensing using DNA-functionalized gold nanorods in a competitive assay format for the detection of interferon-γ;Biosensors and Bioelectronics;2016-07

5. Dual layer photoresist complimentary lithography applied on sapphire substrate for producing submicron patterns;Microsystem Technologies;2013-07-04

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