1. Budker institute of nuclear physics SB RAS,Novosibirsk,Russia
2. Budker institute of nuclear physics SB RAS Novosibirsk State University,Novosibirsk,Russia
3. Scientific and Technological Centre of Unique Instrumentation of the Russian Academy of Sciences,Moscow,Russia
4. Rzhanov Institute of Semiconductor Physics SB RAS,Novosibirsk,Russia
5. Novosibirsk State Technical University,Department of Semiconductor Devices and Microelectronics,Novosibirsk,Russia