1. Rzanov Institute of Semiconductor Physics,Laboratory of nanotechnology and nanomaterials,Novosibirsk,Russia
2. Rzanov Institute of Semiconductor Physics,Laboratory for Ellipsometry of Semiconductor Materials and Structures,Novosibirsk,Russia
3. Rzanov Institute of Semiconductor Physics,Laboratory of Physics and Technology of Three-Dimensional Nanostructures,Novosibirsk,Russia