Simulation, Making and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate-Reference-Cited by-同舟云学术

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Simulation, Making and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate

Published:2019-05 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)
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Author:

Buryy Oleh,Sugak Dmytro,Syvorotka Ihor,Yakhnevych Uliana,Suhak Yuriy,Ubizskii Sergii,Fritze Holger

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8806197/8817368/08817401.pdf?arnumber=8817401

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Lithium Niobate Piezoelectric Actuator-Integrated Fiber Fabry-Pérot Tunable Filter with Ultrahigh Speed and Linearity;ACS Photonics;2024-03-15

2. Adaptive X-Ray Optical Elements Based on Bending Piezoactuators: Possibilities and Prospects of Practical Application;Crystallography Reports;2022-12

3. Bidomain Ferroelectric Crystals: Properties and Prospects of Application;Russian Microelectronics;2021-12

4. Determination of optimal crystallographic orientations for LiNbO<sub>3</sub> and LiTaO<sub>3</sub> bimorph actuators;Journal of Sensors and Sensor Systems;2021-05-03

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