Frequency Analysis of Dopant Profiling and Capacitance Spectroscopy using Scanning Microwave Microscopy
Author:
Funder
EC-FP7 PEOPLE
Austrian FFG
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Computer Science Applications
Link
http://xplorestaging.ieee.org/ielx7/7729/4359107/07742402.pdf?arnumber=7742402
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