Enhancement of CMOSFETs Performance by Utilizing SACVD-Based Shallow Trench Isolation for the 40-nm Node and Beyond-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Enhancement of CMOSFETs Performance by Utilizing SACVD-Based Shallow Trench Isolation for the 40-nm Node and Beyond

Published:2011-05 Issue:3 Volume:10 Page:433-438
ISSN:1536-125X
Container-title:IEEE Transactions on Nanotechnology
language:
Short-container-title:IEEE Trans. Nanotechnology

Author:

Huang Yao-Tsung,Wu San-Lein,Chang Shoou-Jinn,Hung Chin-Kai,Wang Tzu-Juei,Kuo Cheng-Wen,Huang Cheng-Tung,Cheng Osbert

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications

Link

http://xplorestaging.ieee.org/ielx5/7729/5764947/05439751.pdf?arnumber=5439751

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Novel gap filling technique of shallow trench isolation structure in 16/14 nm FinFET using sub-atmospheric chemical vapor deposition;Journal of Materials Science: Materials in Electronics;2020-05-06

2. Mechanical stress in silicon nanosized architectures: Defects of SOD processed silica filler;Journal of Alloys and Compounds;2014-07

3. Optical characterization of polysilazane based silica thin films on silicon substrates;Applied Surface Science;2013-01

4. Innovative Gap-Fill Strategy for 28 nm Shallow Trench Isolation;ECS Transactions;2012-04-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP