Design of Setup for Laser Induced Plasma Etching
Author:
Affiliation:
1. Institute of Scientific Instruments of the Czech Academy of Sciences,Brno,Czech Republic
Funder
Czech Academy of Sciences
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10649892/10652259/10652276.pdf?arnumber=10652276
Reference7 articles.
1. Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing
2. Dry Etching of Germanium with Laser Induced Reactive Micro Plasma
3. Dry etching of monocrystalline silicon using a laser-induced reactive micro plasma
4. Etching of SiC-SiC-composites by a laser-induced plasma in a reactive gas;Klaus;Ceramics International,2022
5. Ultrahigh Precision Machining of Polymer Surface using Laser-Induced Reactive Micro-Plasmas
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