Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications-Reference-Cited by-同舟云学术

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Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications

Published:2019-12 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE International Electron Devices Meeting (IEDM)
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Author:

Francois T.,Pellissier C.,Slesazeck S.,Havel V.,Richter C.,Makosiej A.,Giraud B.,Breyer E. T.,Materano M.,Chiquet P.,Bocquet M.,Grenouillet L.,Nowak E.,Schroeder U.,Gaillard F.,Coignus J.,Blaise P.,Carabasse C.,Vaxelaire N.,Magis T.,Aussenac F.,Loup V.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8971803/8993428/08993485.pdf?arnumber=8993485

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