Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing-Reference-Cited by-同舟云学术

Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing

Author:

Al-Rawashdeh Yazan M.¹^ORCID,Al Janaideh Mohammad¹^ORCID,Heertjes Marcel F.²

Affiliation:

1. Department of Mechanical Engineering, Memorial University, St. John’s, Canada

2. ASML, Veldhoven, The Netherlands

Funder

Natural Sciences and Engineering Research Council of Canada

Memorial University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

Reference37 articles.

1. Analysis of wafer heating in 14 nm DUV layers;subramany;Metrology Inspection and Process Control for Microlithography XVII,2016

3. Thermal effect induced wafer deformation in high-energy e-beam lithography;chen;Alternative Lithographic Technologies VII,2015

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