Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing
Author:
Affiliation:
1. Department of Mechanical Engineering, Memorial University, St. John’s, Canada
2. ASML, Veldhoven, The Netherlands
Funder
Natural Sciences and Engineering Research Council of Canada
Memorial University
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/8856/10007430/09900272.pdf?arnumber=9900272
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5. Control of Wafer Scanners: Methods and Developments
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