Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing
Author:
Affiliation:
1. Department of Mechanical Engineering, Memorial University, St. John’s, Canada
2. ASML, Veldhoven, The Netherlands
Funder
Natural Sciences and Engineering Research Council of Canada
Memorial University
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/8856/10007430/09900272.pdf?arnumber=9900272
Reference37 articles.
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4. On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System
5. Control of Wafer Scanners: Methods and Developments
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